为大学半导体制造实验室设计特性分析系统（英文）

Virginia Polytechnic Institute and State University recently opened an 1,800 sq. ft. Class 10,000 cleanroom. This cleanroom is designed to help undergraduates learn the elements of the microchip fabrication process over the course of one semester and to encourage them to pursue more advanced studies. Unlike programs based on the use of tightly controlled IC production processes as teaching tools, the equipment used encourages students to experiment to find out how far they can “push” a specific processing tolerance before it affects device parameters. As part of their coursework, students learn how to measure the surface resistivity (i.e., sheet resistance) of test regions on a wafer during processing and to perform I-V characterization of the devices they create, which include capacitors, p-n junction diodes, resistors, and nMOSFETs . This case study describes a simple, cost-effective parameter analysis system, built of easily obtainable components and programmed using a commercial, off-the-shelf test and measurement automation programming environment.

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